Sweeping the lean angle can enhance film thickness uniformity and sidewall protection though also steering clear of significant Electrical power-mirrored neutral species for critical processes.
IBSD normally takes position in a high vacuum environment, reducing noble gas inclusion from the deposited film and improving the environmental steadiness with the coating.
An optional cryogenic pump enhances foundation strain and pumping pace and might be isolated in the chamber all through reactive processes with oxygen.
In-situ ellipsometry delivers essential information on the overall performance of an optical movie even though it can be getting deposited.
Our Reticle® ion beam sputter deposition units are designed and engineered to make specific optical films of the best purity, density, and stability.
Variable angle levels let for really effective slender film strategies. On the other hand, considered one of its largest problems is reproducibility. The substrate is often established at a really oblique angle in relation into the source, and also the films are very delicate on the precision of the angle.
Angstrom Engineering® patterns and engineers Every Reticle® System to provide our companions from the optics Local community the opportunity to produce the movies they need with exceptional purity, density, and uniformity, all inside a extremely repeatable and automatic fashion.
Our special design allows for direct or indirect monitoring in the variable angle phase, reducing the need for tooling things or a witness glass changer. Find out more regarding the Optical Monitoring & Manage deal below.
IBSD processes can also make use of a secondary ion supply for substrate cleaning and energetic help, substrate heating for reactive deposition, As well as in-situ optical checking Refractory metals supplier or ellipsometry for vital layer thickness termination.
All typical Reticle® platforms contain yet another gridless end-Hall ion resource with hollow cathode neutralizer.
The deposition ion supply is directed toward a fabric focus on that has been optimized in equally sizing and placement for your necessary deposition geometry.
Self-aligned ion optics are configured especially for the specified deposition prerequisites and geometry of one's procedure.
Angstrom Engineering’s Reticle® techniques offer a flip-vital solution for anyone seeking to notice any optical design right into a higher-efficiency film.
Dynamic uniformity shaping is attained employing a flux correction protect involving the deposition resource and the substrate.
Each axis of movement is managed as a result of Aeres® applying precision servo motors, providing better than 0.1 levels of positional accuracy. Entrance side infrared heating bulbs tilt With all the stage to offer a steady temperature profile for reactive processes.